Assignment of Assignor's Interest

Recorded: 2007-09-04 Pages: 2

Assignors

ROSTALSKI, HANS-JUERGEN

Executed: 2007-07-19

FELDMANN, HEIKO

Executed: 2007-07-30

ULRICH, WILHELM

Executed: 2007-07-19

Assignee

CARL ZEISS SMT AG

RUDOLF-EBER-STRASSE 2, 73447 OBERKOCHEN, GERMANY

Covered Property (1)

Projection Exposure Apparatus, Projection Exposure Method and Projection Objective

Patent: 7,834,981 →

Application: 11/747,630 →

Publication: US 2008/0117400

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.