Patent Assignment
Reel/Frame 019824/0505
Assignment of Assignor's Interest
Recorded: 2007-08-31
Pages: 3
Assignors
CHO, JUNG-KEUN
Executed: 2007-07-24
KOO, KYO WOOG
Executed: 2007-07-24
SUNG, BO RAM CHAN
Executed: 2007-07-24
Assignee
SEMES CO., LTD.
623-5, UPSUNG-DONG, CHEONAN-SHI, CHUNGCHEONGNAM-DO, KOREA, REPUBLIC OF
Covered Property
(1)
Chucking Member and Spin Head and Method for Chucking Substrate Using the Chucking Member