Patent Assignment
Reel/Frame 019826/0425
Assignment of Assignor's Interest
Recorded: 2007-09-14
Pages: 3
Assignor
MIDORIKAWA, RYOTARO
Executed: 2007-08-27
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Treatment Device, Treatment Device Consumable Parts Management Method, Treatment System, and Treatment System Consumable Parts Management Method