Patent Assignment
Reel/Frame 019829/0235
Assignment of Assignor's Interest
Recorded: 2007-09-14
Pages: 4
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450-A, LEGAL AFFAIRS DEPARTMENT, SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Apparatus for Wafer Level Arc Detection at an Rf Bias Impedance Match to the Pedestal Electrode