Patent Assignment
Reel/Frame 019856/0819
Assignment of Assignor's Interest
Recorded: 2007-09-20
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-6 AKASAKA 5-CHOME, MINATO-KU TOKYO, 107-8481, JAPAN
Covered Property
(1)
Determining Profile Parameters of a Structure Formed on a Semiconductor Wafer Using a Dispersion Function Relating Process Parameter to Dispersion