Assignment of Assignor's Interest

Recorded: 2007-09-24 Pages: 4

Assignors

GRUNER, TORALF

Executed: 2007-08-27

EPPLE, ALEXANDER

Executed: 2007-08-20

DEGUENTHER, MARKUS

Executed: 2007-08-27

Assignee

CARL ZEISS SMT AG

RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY

Covered Property (1)

Microlithographic Projection Exposure Apparatus

Application: 11/814,928 →

Publication: US 2008/0192224

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.