Patent Assignment
Reel/Frame 019882/0303
Assignment of Assignor's Interest
Recorded: 2007-09-25
Pages: 3
Assignees
CANON KABUSHIKI KAISHA
3-30-2, SHIMOMARUKO, OHTA-KU, TOKYO, JAPAN
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHI SHIMBASHI, 1-CHOME, MINATO-KU TOKYO, JAPAN
Covered Property
(1)
Deflector Array, Exposure Apparatus, and Device Manufacturing Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.