Patent Assignment
Reel/Frame 019907/0770
Assignment of Assignor's Interest
Recorded: 2007-10-02
Pages: 2
Assignors
MATSUSHITA, KIYOHIRO
Executed: 2007-09-25
FUKUDA, HIDEAKI
Executed: 2007-09-25
KAGAMI, KENICHI
Executed: 2007-09-25
Assignee
ASM JAPAN K.K.
23-1, 6-CHOME, NAGAYAMA, TAMA-SHI, TOKYO, 206-0025, JAPAN
Covered Property
(1)
Method of Cleaning Uv Irradiation Chamber