Patent Assignment
Reel/Frame 019912/0693
Assignment of Assignor's Interest
Recorded: 2007-09-25
Pages: 4
Assignors
BERNHARD, STEFAN HEMBACHER
Executed: 2007-08-06
KUGLER, GELLRICH
Executed: 2007-08-06
KUGLER, JENS
Executed: 2007-08-06
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STR. 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
An optical imaging device and optical imaging method with adjustment device for reducing dynamic fluctuations in the pressue difference
Application:
11/804,632 →
Publication:
US 2008/0013063
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.