Assignment of Assignor's Interest

Recorded: 2007-10-03 Pages: 4

Assignors

SINGER, WOLFGANG

Executed: 2007-08-03

BADER, DIETER

Executed: 2007-08-13

WANGLER, JOHANNES

Executed: 2007-09-20

DEGUENTHER, MARKUS

Executed: 2007-08-27

Assignee

CARL ZEISS SMT AG

RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY

Covered Property (1)

Illumination System for a Microlithographic Projection Exposure Apparatus

Application: 11/813,529 →

Publication: US 2008/0111983

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.