Patent Assignment
Reel/Frame 019923/0921
Assignment of Assignor's Interest
Recorded: 2007-09-26
Pages: 4
Assignor
ASADA, NAOKI
Executed: 2007-09-13
Assignee
NIKON CORPORATION
2-3, MARUNOUCHI 3-CHOME, CHIYODA-KU, TOKYO, 100-8331, JAPAN
Covered Property
(1)
Suction Apparatus, Polishing Apparatus, Semiconductor Device, and Method of Manufacturing a Semiconductor Device