Patent Assignment
Reel/Frame 019932/0846
Assignment of Assignor's Interest
Recorded: 2007-10-09
Pages: 4
Assignors
LUBOMIRSKY, DMITRY
Executed: 2007-09-25
CHEN, XINGLONG
Executed: 2007-09-25
GONDHALEKAR, SUDHIR
Executed: 2007-09-25
NARENDRNATH, KADTHALA RAMAYA
Executed: 2007-10-05
RASHEED, MUHAMMAD
Executed: 2007-09-26
KAUSHAL, TONY
Executed: 2007-09-24
Assignee
APPLIED MATERIALS, INC.
P. O. BOX 450A, SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Method of Making an Electrostatic Chuck with Reduced Plasma Penetration and Arcing