Patent Assignment
Reel/Frame 019939/0795
Assignment of Assignor's Interest
Recorded: 2007-10-10
Pages: 4
Assignors
SUGIURA, TETSURO
Executed: 2007-08-24
TANAKA, KEIJI
Executed: 2007-08-24
NAKAZAWA, TOSHIHARU
Executed: 2007-08-24
YAMAZAKI, TOMOYUKI
Executed: 2007-08-24
KIDO, KOICHI
Executed: 2007-08-24
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, 144-8510, JAPAN
Covered Property
(1)
Vacuum Pump Self-Diagnosis Method, Vacuum Pump Self-Diagnosis System, and Vacuum Pump Central Monitoring System