Patent Assignment
Reel/Frame 019944/0764
Assignment of Assignor's Interest
Recorded: 2007-09-04
Pages: 3
Assignor
PATRICK, ROGER
Executed: 2007-09-04
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Method and Apparatus for Diagnosing Status of Parts in Real Time in Plasma Processing Equipment