Patent Assignment
Reel/Frame 019951/0114
Assignment of Assignor's Interest
Recorded: 2007-09-21
Pages: 3
Assignors
SAKAMOTO, KOICHI
Executed: 2007-05-31
OBATA, MINORU
Executed: 2007-06-04
KOYAMA, NORIAKI
Executed: 2007-06-08
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO-TO, JAPAN
Covered Property
(1)
Semiconductor Manufacturing Apparatus, Method of Detecting Abnormality, Identifying Cause of Abnormality, or Predicting Abnormality in the Semiconductor Manufacturing Apparatus, and Storage Medium Storing Computer Program for Performing the Method