Patent Assignment
Reel/Frame 019952/0161
Assignment of Assignor's Interest
Recorded: 2007-10-03
Pages: 3
Assignors
HIRAO, TAKESHI
Executed: 2007-06-26
FUJIMOTO, AKIHIRO
Executed: 2007-06-27
SOUMA, YASUTAKA
Executed: 2007-06-27
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO-TO, JAPAN
Covered Property
(1)
Nozzle Cleaning Apparatus, Nozzle Cleaning Method, and a Computer-Readable Storage Medium Storing Nozzle Cleaning Program