Patent Assignment
Reel/Frame 019954/0976
Assignment of Assignor's Interest
Recorded: 2007-09-25
Pages: 3
Assignors
SCHEIBLE, PATRICK
Executed: 2007-07-29
PAZIDIS, ALEXANDRA
Executed: 2007-02-02
GARREIS, REINER
Executed: 2007-02-13
TOTZECK, MICHAEL
Executed: 2007-02-13
FELDMANN, HEIKO
Executed: 2007-01-31
GRAEUPNER, PAUL
Executed: 2007-02-13
ROSTALSKI, HANS-JUERGEN
Executed: 2007-02-05
SINGER, WOLFGANG
Executed: 2007-02-12
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Projection System with Compensation of Intensity Variations and Compensation Element Therefor
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.