Patent Assignment
Reel/Frame 019963/0242
Assignment of Assignor's Interest
Recorded: 2007-10-15
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Semiconductor Device Manufacturing Method, Semiconductor Device, Plasma Nitriding Treatment Method, Control Program and Computer Storage Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.