Assignment of Assignor's Interest

Recorded: 2007-10-15 Pages: 2

Assignor

FIOLKA, DAMIAN

Executed: 2007-10-09

Assignee

CARL ZEISS SMT AG

RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY

Covered Property (1)

Subsystem of an Illumination System of a Microlithographic Projection Exposure Apparatus

Patent: 8,035,803 →

Application: 11/850,255 →

Publication: US 2008/0055580

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.