Patent Assignment
Reel/Frame 019973/0659
Assignment of Assignor's Interest
Recorded: 2007-10-12
Pages: 2
Assignor
DENGEL, GUENTHER
Executed: 2007-06-11
Assignee
CARL ZEISS SMT AG
CARL-ZEISS STRASSE 22, HEIDENHEIM, D-73447, GERMANY
Covered Property
(1)
Facet mirror comprising a multiplicity of mirror segments
Application:
11/789,072 →
Publication:
US 2008/0266686
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.