Patent Assignment
Reel/Frame 019980/0492
Assignment of Assignor's Interest
Recorded: 2007-10-18
Pages: 2
Assignor
LEE, IN TAEK
Executed: 2007-10-04
Assignee
ADP ENGINEERING CO., LTD.
333-5, SANGDAEWON-DONG, JUNGWON-GU, SEONGNAM-SI, GYEONGGI-DO, 462-120, KOREA, REPUBLIC OF
Covered Property
(1)
System and Method for Introducing a Substrate into a Process Chamber