Patent Assignment
Reel/Frame 019981/0199
Assignment of Assignor's Interest
Recorded: 2007-10-18
Pages: 5
Assignors
BETTENCOURT, GREG
Executed: 2007-10-05
DHINDSA, RAJ
Executed: 2007-10-05
DIERCKS, GEORGE
Executed: 2007-10-03
HARDIN, RANDALL A.
Executed: 2007-10-03
KEIHL, JON
Executed: 2007-10-04
LYTLE, DUANE
Executed: 2007-10-04
MARAKHTANOV, ALEXEI
Executed: 2007-10-05
PATRICK, ROGER
Executed: 2007-10-05
PEGG, JOHN
Executed: 2007-10-04
SPENCER, SHANNON
Executed: 2007-10-04
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538-6401
Covered Property
(1)
Showerhead Electrode Assemblies and Plasma Processing Chambers Incorporating the Same