Assignment of Assignor's Interest

Recorded: 2007-10-18 Pages: 3

Assignors

TOMA, DOREL I.

Executed: 2007-10-15

LIU, JUNJUN

Executed: 2007-09-27

Assignee

TOKYO ELECTRON LIMITED

TBS BROADCAST CENTER, 3-6 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN

Covered Property (1)

Method and System for Forming an Air Gap Structure

Patent: 7,666,754 →

Application: 11/874,461 →

Publication: US 2009/0130863