Patent Assignment
Reel/Frame 019982/0823
Assignment of Assignor's Interest
Recorded: 2007-10-18
Pages: 3
Assignor
SAKANO, SHINJI
Executed: 2007-09-25
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Controlling Device for Substrate Processing Apparatus and Method Therefor