Patent Assignment
Reel/Frame 020016/0013
Assignment of Assignor's Interest
Recorded: 2007-10-25
Pages: 4
Assignee
TOKYO ELECTRON LIMITED
3-6 AKASAKA 5-CHOME, MINATO-KU, TBS BROADCAST CENTER, TOKYO, 107, JAPAN
Covered Property
(1)
Electrical Contacts for Integrated Circuits and Methods of Forming Using Gas Cluster Ion Beam Processing