Patent Assignment
Reel/Frame 020039/0157
Assignment of Assignor's Interest
Recorded: 2007-10-30
Pages: 2
Assignors
HATAKEYAMA, JUN
Executed: 2007-09-11
YOSHIHARA, TAKAO
Executed: 2007-09-11
HARADA, YUJI
Executed: 2007-09-11
KUSAKI, WATARU
Executed: 2007-09-11
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OTEMACHI 2-CHOME, CHIYODA-KU,, TOKYO, JAPAN
Covered Property
(1)
Resist Composition and Patterning Process