Patent Assignment
Reel/Frame 020065/0481
Assignment of Assignor's Interest
Recorded: 2007-10-25
Pages: 3
Assignee
USHIO DENKI KABUSHIKI KAISHA
2-6-1, OTE-MACHI, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Extreme Ultraviolet Radiation Source Device