Patent Assignment
Reel/Frame 020066/0038
Assignment of Assignor's Interest
Recorded: 2007-10-24
Pages: 4
Assignors
WATANABE, TAKERU
Executed: 2007-10-10
OHSAWA, YOUICHI
Executed: 2007-10-10
OHASHI, MASAKI
Executed: 2007-10-10
KUSAKI, WATARU
Executed: 2007-10-10
KOBAYASHI, TOMOHIRO
Executed: 2007-10-10
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Nitrogen-Containing Organic Compound, Resist Composition and Patterning Process