Patent Assignment
Reel/Frame 020076/0544
Assignment of Assignor's Interest
Recorded: 2007-11-07
Pages: 4
Assignors
OHSAKI, YUMIKO
Executed: 2007-08-23
SAWADA, YASUHIRO
Executed: 2007-09-02
YAMAZOE, KENJI
Executed: 2007-08-23
TAKEUCHI, SEIJI
Executed: 2007-08-23
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Exposure Apparatus and Device Manufacturing Method Using a Common Path Interferometer to Form an Interference Pattern and a Processor to Calculate Optical Characteristics of Projection Optics Using the Interference Pattern