Patent Assignment
Reel/Frame 020093/0024
Assignment of Assignor's Interest
Recorded: 2007-11-09
Pages: 4
Assignors
ZIBOLD, AXEL
Executed: 2007-08-02
HARNISCH, WOLFGANG
Executed: 2007-08-08
KIENZLE, OLIVER
Executed: 2007-08-16
Assignee
CARL ZEISS SMS GMBH
CARL-ZEISS-PROMENADE 10, JENA, 07745, GERMANY
Covered Property
(1)
Method and Arrangement for Repairing Photolithography Masks
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.