Patent Assignment
Reel/Frame 020113/0893
Assignment of Assignor's Interest
Recorded: 2007-11-06
Pages: 3
Assignors
HASEBE, KAZUHIDE
Executed: 2007-09-28
ISHIDA, YOSHIHIRO
Executed: 2007-09-28
FUJITA, TAKEHIKO
Executed: 2007-09-22
OGAWA, JUN
Executed: 2007-09-25
NAKAJIMA, SHIGERU
Executed: 2007-09-28
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Film Formation Method and Apparatus for Forming Silicon Oxide Film