Patent Assignment
Reel/Frame 020127/0426
Assignment of Assignor's Interest
Recorded: 2007-11-16
Pages: 5
Assignors
LIN, CHUN-HSIEN
Executed: 2007-11-15
WANG, AMY
Executed: 2007-11-15
KO, FRANCIS
Executed: 2007-11-15
WANG, JEAN
Executed: 2007-11-15
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN ROAD 6, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Methodology to Enable Wafer Result Prediction of Semiconductor Wafer Batch Processing Equipment