Patent Assignment
Reel/Frame 020139/0116
Assignment of Assignor's Interest
Recorded: 2007-11-20
Pages: 3
Assignee
ADVANCED TECHNOLOGY DEVELOPMENT FACILITY
2706 MONTOPOLIS DRIVE, AUSTIN, TEXAS, 78741
Covered Property
(1)
Automated Systems and Methods for Adapting Semiconductor Fabrication Tools to Process Wafers of Different Diameters
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.