Patent Assignment
Reel/Frame 020144/0752
Assignment of Assignor's Interest
Recorded: 2007-11-20
Pages: 3
Assignors
CHIN, KYOUNG-HWAN
Executed: 2007-10-29
KIM, KYOUNG-IN
Executed: 2007-10-29
JUNG, HAK-SU
Executed: 2007-10-29
AN, KYOUNG-MIN
Executed: 2007-10-29
Assignee
SAMSUNG ELECTRONICS CO., LTD.
416, MAETAN-DONG, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, KOREA, REPUBLIC OF
Covered Property
(1)
Semiconductor Device Fabrication Equipment for Performing Peox Process and Method Including Cleaning the Equipment with Remotely Produced Plasma