Patent Assignment
Reel/Frame 020146/0754
Assignment of Assignor's Interest
Recorded: 2007-11-21
Pages: 2
Assignee
ASM JAPAN K.K.
23-1, 6-CHOME, NAGAYAMA, TAMA-SHI, TOKYO, 206-0025, JAPAN
Covered Property
(1)
Method of Forming Ultra-Thin Sin Film by Plasma Cvd