Patent Assignment
Reel/Frame 020158/0726
Assignment of Assignor's Interest
Recorded: 2007-11-09
Pages: 4
Assignors
WANG, LON
Executed: 2007-09-21
CHEN, YUNG-PIN
Executed: 2007-09-21
JAO, CHIH-SHENG
Executed: 2007-09-21
CHANG, SHUO-HUNG
Executed: 2007-10-18
CHANG, JER-HAUR
Executed: 2007-09-21
Assignee
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
NO. 195, SEC 4, CHUNG-HSING ROAD, CHU-TUNG, HSIN-CHU, ROC, TAIWAN
Covered Property
(1)
Method and Apparatus for Generating Periodic Patterns by Step-and-Align Interference Lithography