Patent Assignment
Reel/Frame 020160/0749
Assignment of Assignor's Interest
Recorded: 2007-11-19
Pages: 6
Assignors
SINGER, WOLFGANG
Executed: 2007-03-23
WANGLER, JOHANNES
Executed: 2007-03-23
EGGER, RAFAEL
Executed: 2007-03-24
ULRICH, WILHELM
Executed: 2007-03-23
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMAN DEMOCRATIC REPUBLIC
Covered Property
(1)
Illumination System of a Microlithographic Exposure Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.