Patent Assignment
Reel/Frame 020162/0791
Assignment of Assignor's Interest
Recorded: 2007-11-19
Pages: 2
Assignor
SIJBEN, ANKO JOZEF CORNELUS
Executed: 2007-11-09
Assignee
ASML NETHERLANDS B.V.
DERUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Electrostatic Clamp, Lithographic Apparatus and Method of Manufacturing an Electrostatic Clamp