Patent Assignment
Reel/Frame 020169/0707
Assignment of Assignor's Interest
Recorded: 2007-11-28
Pages: 3
Assignors
CHEN, KUANG-JUNG
Executed: 2007-11-06
HUANG, WU-SONG
Executed: 2007-11-06
LI, WAI-KIN
Executed: 2007-11-13
VARANASI, PUSHKARA R.
Executed: 2007-11-06
Assignee
INTERNATIONAL BUSINESS MACHINES CORPORATION
NEW ORCHARD ROAD, ARMONK, NEW YORK, 10504
Covered Property
(1)
Photoresist Compositions and Process for Multiple Exposures with Multiple Layer Photoresist Systems