Patent Assignment
Reel/Frame 020170/0965
Assignment of Assignor's Interest
Recorded: 2007-11-28
Pages: 4
Assignor
IKEHATA, YOSHITERU
Executed: 2007-10-12
Assignee
DAIFUKU CO., LTD.
3-2-11, MITEJIMA, NISHIYODOGAWA-KU, OSAKA, JAPAN
Covered Property
(1)
Substrate Storage Facility and Substrate Processing Facility, and Method for Operating Substrate Storage