Patent Assignment
Reel/Frame 020172/0763
Assignment of Assignor's Interest
Recorded: 2007-11-29
Pages: 3
Assignors
WANG, CHIEH-JU
Executed: 2007-09-13
YAU, JYH-CHERNG
Executed: 2007-09-13
LAI, YU-TSUNG
Executed: 2007-09-13
LIAO, JIUNN-HSIUNG
Executed: 2007-09-13
Assignee
UNITED MICROELECTRONICS CORP.
NO.3, LI-HSIN ROAD 2, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU CITY, TAIWAN
Covered Property
(1)
Cleaning Method Following Opening Etch