Patent Assignment
Reel/Frame 020177/0698
Assignment of Assignor's Interest
Recorded: 2007-11-29
Pages: 4
Assignors
MIYA, HIRONOBU
Executed: 2007-11-01
SATO, TAKETOSHI
Executed: 2007-11-01
MIZUNO, NORIKAZU
Executed: 2007-11-01
SAKAI, MASANORI
Executed: 2007-11-05
NODA, TAKAAKI
Executed: 2007-11-12
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 101-8980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Producing Method of Semiconductor Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.