Patent Assignment
Reel/Frame 020181/0093
Assignment of Assignor's Interest
Recorded: 2007-11-30
Pages: 5
Assignors
MIYA, HIRONOBU
Executed: 2007-09-12
TOYODA, KAZUYUKI
Executed: 2007-09-12
MIZUNO, NORIKAZU
Executed: 2007-09-12
SATO, TAKETOSHI
Executed: 2007-09-12
SAKAI, MASANORI
Executed: 2007-09-12
ASAI, MASAYUKI
Executed: 2007-09-12
OKUDA, KAZUYUKI
Executed: 2007-09-13
HORITA, HIDEKI
Executed: 2007-09-12
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1 SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 101-8980, JAPAN
Covered Property
(1)
Production Method for Semiconductor Device and Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.