Patent Assignment
Reel/Frame 020207/0280
Assignment of Assignor's Interest
Recorded: 2007-12-06
Pages: 3
Assignor
TANAKA, KEIICHI
Executed: 2007-11-30
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Sealing Structure of Vacuum Device