Patent Assignment
Reel/Frame 020211/0851
Assignment of Assignor's Interest
Recorded: 2007-12-07
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Apparatus and Method for Measuring the Concentration of Organic Gas