Patent Assignment
Reel/Frame 020214/0312
Assignment of Assignor's Interest
Recorded: 2007-12-07
Pages: 4
Assignors
DODOC, AURELIAN
Executed: 2007-11-19
ULRICH, WILHELM
Executed: 2007-11-15
BADER, DIETER
Executed: 2007-11-11
EPPLE, ALEXANDER
Executed: 2007-11-16
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMAN DEMOCRATIC REPUBLIC
Covered Property
(1)
Projection Objective, Projection Exposure Apparatus and Reflective Reticle for Microlithography
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.