Patent Assignment
Reel/Frame 020241/0234
Assignment of Assignor's Interest
Recorded: 2007-12-13
Pages: 2
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Microlithograph System
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.