Patent Assignment
Reel/Frame 020241/0755
Assignment of Assignor's Interest
Recorded: 2007-12-05
Pages: 3
Assignors
TOMITA, MASAHIKO
Executed: 2007-10-01
UMEZAWA, KOTA
Executed: 2007-10-02
SON, RYOU
Executed: 2007-10-09
NISHIMURA, TOSHIHARU
Executed: 2007-10-09
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Semiconductor Processing Apparatus and Method for Using Same