Patent Assignment
Reel/Frame 020250/0307
Assignment of Assignor's Interest
Recorded: 2007-12-14
Pages: 6
Assignors
XU, HUIWEN
Executed: 2007-11-27
LIU, YIJUN
Executed: 2007-10-17
XIA, LI-QUN
Executed: 2007-11-27
WITTY, DEREK R
Executed: 2007-11-29
M'SAAD, HICHEM
Executed: 2007-11-29
Assignee
APPLIED MATERIALS, INC.
P. O. BOX 450A, SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Methods to Obtain Low K Dielectric Barrier with Superior Etch Resistivity