Patent Assignment
Reel/Frame 020266/0431
Assignment of Assignor's Interest
Recorded: 2007-12-14
Pages: 2
Assignor
HITACHI, LTD.
Executed: 2007-12-07
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHISHINBASHI 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Plasma Processing Apparatus Using Active Matching
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.